Chemical Gas

Brand  : ChemGas Korea
Roles  : Trading & Supply (Import & Export)
Products   : Chemicals, Specialty Chemicals, Chemical Equipment

Distribution Chart of Sales

Key features

  • Certified ISO 9001 & 14001
  • Certified an excimer laser gas mixtures from GIGAPHOTON & CYMER
  • 70% of sales come from electronics or its related business
  • 50% of sales come from oversea business
  • 74 different gases molecules permitted for sales and storage
  • 13 different specialty gases production permission
  • Major dopant materials’ supplier to wafer producers
Major Products or Handled
ProductCapacityPackagingtype
Excimerlasergas(6mixtures)400cylinderspermonthCylinder
N2O(5N5)150kg/Hr.720MT/yearISOcontainer,tonner,cylinder
UHPXenon50cylinderspermonthCylinder
UHPpropylene600cylinderspermonthCylinder,tonner
SiCl48.8MTpermonthCanister,cylinder
SiH4mixture100cylinderspermonthCylinder
PH3,AsH3,GeH4,HCl,Cl2SourcingfromoverseaorlocalCylinder
NF3,WF6,CHF3,C3F8,C2F6,C4F8SourcingfromoverseaorlocalCylinder
BCl3,TDMAT,HFSourcingfromoverseaorlocalCylinder
Methylchlorosilane(MTS)LocalsourceTonner,cylinder
EthyleneLocalsourceCylinder,ISOcontainer
Dopantmaterials(B,Red-P,Sb,As)SourcingfromoverseaGlassbottles
PRODUCT: Excimer Laser Production

MIXTURE GASES’ PRODUCTION CONTROL PANEL

PRODUCT KrF & ArF Including F2 Type Excimer Laser Gas
PURITY Kr (5N), Ne (5N), Xe (5N), Ar (6N), F2 (3N)
NET WEIGHT (CONTENT) & VALVE 47L Cylinder (6600L, 140bar), Valve: JIS22R
CAPACITY §Non F2 type: 300cyls/Mo, §F2 type: 100cyls (Standard:25 business days)
MARKET SHARE KOREA DB Highteck, COHERENT
OVERSEAS Micron Taiwan , Powerchip, Nanya Technology

GIGAPHOTON INC. Certification

Qualification by CYMER USA

Benefits

NEON PURIFICATION SYSTEM

  • Product quality is firmly guaranteed and the final product will be made 100% analysis
  • Competitive Neon is being supplied by major Neon producers in China
PRODUCT: UHP N2O production status

N2O Purification System

CAPACITY & FILLING SYSTEM

Purification Capacity 150kg/hr, 60ton/month
Purification Process Dry and Liquefaction
Designed by Gas Cylinder Engineering Company, Korea
Purity Obtained >5N5
Storage Capacity UHP 30ton, Raw Material _ 30ton
Filling System ISO Container, Tonner & Cylinder
Preconditioning System for ISO Container Turbo Molecular Pump Leybold MAG W 2000CT
Dry Pump Edward IL 600
Preconditioning System for Cylinder & Tonner Edward IL 60
Weighting System ISO container, y-cylinder and cylinder

Vacuum System for N20 ISO Container

VACUMMING & HEATING SYSTEM for PACKAGE

Heating & Vacuuming System Heating Temperature 95-100℃
Cylinder Size 10L / 44L / 47L / 50L
Vacuum Pump Model Edward IL 600
Packaging 47L Cylinder/440L/ISO Container Tank

HIGH PURITY N2O SPEC PRODUCED IN KOREA

Cylinder Vacuuming & Heating System

Maker Impurity (%) O2/Ar (ppm) CO (ppm) CO2 (ppm) THC (asCH4) N2 (ppm) H2O Total ppm
ChemGas 99.9995 <0.3 <0.3 <1.0 CH4 <0.1 <2.0 <1.0 <4.3
W 99.9995 <0.5 <0.1 <0.5 <0.1 <2.0 <1.0 <4.2
A 99.999 <1.0 <0.5 <1.0 CH4 <0.1 <1.5 <1.0 <5.1
L 99.9995 <1.0 <1.0 <1.0 NO-NO2 <1.0 <2.0 <1.0 <7.0
PRODUCT: UHP Propylene(C3H6)

Propylene Purification System

GENERAL INFORMATION

PRODUCT UHP Propylene(C3H6)
PURITY 99.97% (3N8) & 99.99(4N)
NET WEIGHT (CONTENT) & VALVE 47L Cylinder (20.0 kg), Valve: JIS22L
SHELF LIFE 24 Months
CAPACITY 600 cylinders /month(Standard:25 business days)
MARKET SHARE KOREA
OVERSEAS M, PC
 
COMPONETS UNIT SPECIFICATION PHASE DETECTION LIMIT FREQUENCY
C3H6 99.97% 99.99% Liquid
O2 ppmv ≤2.0 ≤2.0 Vapor 0.01 Batch
N2 ppmv ≤10.0 ≤5.0 Vapor 0.01 Batch
CO2 ppmv ≤1.0 ≤1.0 Vapor 0.01 Batch
THC ppmv ≤290.0 ≤90.0 Vapor 0.1 Batch
H2O ppmv ≤3.0 ≤2.0 Vapor 0.01 Lot
PRODUCT: Silicon Tetrachloride(SiCl4).

GENERAL INFORMATION

PRODUCT SiCl4 (Silicon Tetrachloride)
PURITY 99.9999% (6N), Assay 99.9% (3N)
NET WEIGHT (CONTENT) & VALVE 47L Cylinder (50.0 kg) / 216L Cylinder (200.0 kg)
SHELF LIFE 24 Months
CAPACITY 8.8MT/month(Standard:22 business days)
MARKET SHARE KOREA Under Development
OVERSEAS Taiwan, SCT
COMPONETS UNIT SPECIFICATION PHASE DETECTION LIMIT FREQUENCY
C3H6 99.97% 99.99% Liquid
O2 ppmv ≤2.0 ≤2.0 Vapor 0.01 Batch
N2 ppmv ≤10.0 ≤5.0 Vapor 0.01 Batch
CO2 ppmv ≤1.0 ≤1.0 Vapor 0.01 Batch
THC ppmv ≤290.0 ≤90.0 Vapor 0.1 Batch
H2O ppmv ≤3.0 ≤2.0 Vapor 0.01 Lot

QC FLOW CHART

PRODUCT: Xenon

GENERAL INFORMATION

PRODUCT Xenon(Xe)
PURITY 99.99999% (6N)
NET WEIGHT (CONTENT) & VALVE 47L Cylinder (13.5 kg) , 2.3L, 10L, Valve: DIS718
SHELF LIFE 5 Years
CAPACITY 50 cylinders/month(Standard:22 business days)
MARKET SHARE KOREA DB HITEK and others
OVERSEAS TSMC Taiwan and Others

State of art facility which can purify up to <10ppb /each for the impurity content of <1ppm/each

QC Equipment
ITEM MODEL MAKER QTY APPLICATION
GC-TCD 580 Gow-mac 1 RatioAnalysisinMixtureGas
GC-DID 590 Gow-mac 2 ImpuritiesAnalysisinPureGas
GC-PED Multiditek2 LDeTek 2 ImpuritiesAnalysisinPureGas
GC-PDD Agilent 7890B 1 ImpuritiesAnalysisinPureGas
GC-TCD Multiditek2 LDeTek 1 RatioAnalysisinMixtureGas
FTIR Antaris Thermo 1 Ratio&ImpuritiesAnalysisinGas
H2OAnalyzer AquaVolt+ Meeco 1 H2OAnalysisinPureGas
H2OAnalyzer HALO3 Tigeroptics 1 H2OAnalysisinPure&MixturesGas
Dew-pointmeter XDT-100 Xentaur 1 H2OAnalysisinPureGas
O2Analyzer DF310 Servomex 1 O2AnalysisinPure
ICPOES 700Series Agilent 1 MetalimpuritiesAnalysis
Customer Reference