Parts Clearing & Coating
PARTS CLEANING & COATING
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01
Coating Mechanism
Spray Coating Mechanism

Adhesion Mechanism
- Liquid coating material in flight
- Impact on surface
- Transfer of heat to the base material
- Solidification and contraction of the coating material
- Mechanical bonding
- Local diffusion or fusion (during heat treatment)
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02
Coating
Plasma Spray Coating (Y2O3, Al2O3)
Special Material Coating (UC/BONO/SH/Silicon)
- Reduced Porosity and micro crack inside the coating layer for better plasma & chemical resistance
- Higher Surface Roughness (Ra) compared to Y2O3 coating layer
- Hold up more particle
- Minimize gas residue trapped inside the pore in coating layer
New Tech. & NANO Structure Coating (N1, NOVA)
- Less than 1% Porosity à High Density Coating
- Reduced Porosity and micro crack inside the coating layer
- Particle and Defect Control from part surface
- Excellent Plasma Resistance à Surface Corrosion & Erosion Protection

Various Types of Coating
UC Coating | HD Coating | HDS 1,2 Coating | HP Treatment |
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Features & benefits: This coating has high hardness and density, compared to Y203 by reducing internal defects (loser porosity and micro crack)
* Improved chemical and plasma resistance | Features & benefits: Minimized condition change inside the chamber by making a coating layer that can material quality of Y203
* Reduced particle from raw material & plasma damage and out gassing | Features & benefits: Coating which has big improvement on plasma resistance and surface stabilization by laminating high density coating on APS coating layer
* Stabilized Particle Trend in chamber with improving plasma resistance | Features & benefits: Shielded pore and connected channel with outside by sealing open pore and micro crack inside coating layer
* Reduced out gassing with covering micro channel |
